1 Stück - Ultrasonic or X-Ray based measurement system Optionen: Option 1 - LV Pos. 16.2 - Contamination level for non-precious metals (" Al, Ti ≤ 50.0*E10 at/cm², all other metals ≤ 5.0*E10 at/cm²") Option 2 - LV Pos. 16.4 - Contamination level for noble metals (Ag, Au, Pd, Pt, Ru) (Confirmation of precious metal concentration < 0.05*E10 at/cm2 (< LOD)) Option 3 - LV Pos. 20.1 - Please offer to extend the warranty by a further 12 months to a total of 24 months. (Please specify as an option. If an extension of the warranty is offered, the full number of points will be awarded, otherwise 0 points will be awarded.) Option 4 - LV Pos. 20.2 - Please offer an Option to handle transparent substrates (like glas wafers) (Please specify as an option. If an option is offered, the full number of points will be awarded, otherwise 0 points will be awarded.)