1 Stück - Plasma Activation Tool (IPMS-MRS14.3) Option 1 (LV Pos. 2.1): Please offer an extended warranty of further 12 months (in total 24 month) Option 2 (LV Pos. 3.2): The tool should handle wafers with the size of Option 3 (LV Pos. 3.6): The equipment provides a chuck for wafer size of 300mm Option 4 (LV Pos. 3.8): The machine can handle a tape mounted wafer with dicing frame for 300mm wafer according to IPMS specification